Abstract: We are poised in a revolution of microelectronics, which has dramatically reduced the cost and increased the capability of electronics. This has given much potential to prosper in the area of micro mechanics encompassing MEMS (Micro Electro Mechanical Systems). MEMS promises to revolutionize nearly every product category by bringing together silicon based microelectronics with micro machining technology, making possible the realization of complete systems on a chip.
The paper outlines the fabrication techniques, benefits, applications and challenges of MEMS. MEMS, often referred to as micro systems technology, are fabricated using modified silicon and non-silicon fabrication technology. It reduces cost and increases reliability of the system. MEMS--scale accelerometers, geophones and gyros are replacing some of the standard size precursors and are establishing new markets of their own. Commercial applications are nertial sensors, Power MEMS and RF switches. This technology is also used in industrial, consumer and auto motive marketing.